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1

Spectroscopic ellipsometry measurements of thin metal films

Tompkins, Harland G., Tasic, Sonja, Baker, Jeff, Convey, Diana

Journal:

Surface and Interface Analysis

Year:

2000

Language:

english

File:

PDF, 151 KB

english, 2000

2

Film thickness measurements using ellipsometry when the lower interface is uncharacterized

Harland G Tompkins

Journal:

Thin Solid Films

Year:

1989

Language:

english

File:

PDF, 495 KB

english, 1989

3

Survey of methods to characterize thin absorbing films with Spectroscopic Ellipsometry

James N. Hilfiker, Neha Singh, Tom Tiwald, Diana Convey, Steven M. Smith, Jeffrey H. Baker, Harland G. Tompkins

Journal:

Thin Solid Films

Year:

2008

Language:

english

File:

PDF, 1.35 MB

english, 2008

4

Titanium nitride oxidation chemistry: An x-ray photoelectron spectroscopy study

Saha, Naresh C., Tompkins, Harland G.

Journal:

Journal of Applied Physics

Year:

1992

Language:

english

File:

PDF, 1.19 MB

english, 1992

5

Effect of process parameters on the optical constants of thin metal films

Tompkins, Harland G., Baker, Jeffrey H., Convey, Diana

Journal:

Surface and Interface Analysis

Year:

2000

Language:

english

File:

PDF, 78 KB

english, 2000

6

Optimizing the ellipsometric analysis of a transparent layer on glass

Harland G. Tompkins, Steven Smith, Diana Convey

Journal:

Surface and Interface Analysis

Year:

2000

Language:

english

File:

PDF, 118 KB

english, 2000

7

Degradation of thin films of a fluoropolymer

Harland G. Tompkins

Journal:

Journal of Applied Polymer Science

Year:

1973

Language:

english

File:

PDF, 565 KB

english, 1973

8

The study of the gas—solid interaction of acetic acid with a cuprous oxide surface using reflection—absorption spectroscopy

Harland G. Tompkins, David L. Allara

Journal:

Journal of Colloid and Interface Science

Year:

1974

Language:

english

File:

PDF, 1.01 MB

english, 1974

9

Controlled crystallization of LPCVD amorphous silicon

Harland G. Tompkins, Ken Seddon, Lisa K. Garling, Peter Fejes

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 601 KB

english, 1996

10

Preface

Harland G. Tompkins

Journal:

Thin Solid Films

Year:

2011

Language:

english

File:

PDF, 697 KB

english, 2011

11

Convenient calibration of FTIR peak ‘size’ for thin organic/polymer films

Andrew E. Hooper, Harland G. Tompkins

Journal:

Surface and Interface Analysis

Year:

2001

Language:

english

File:

PDF, 92 KB

english, 2001

12

Determining the amount of Si–Si bonding in CVD oxynitrides

Harland G. Tompkins, Steven Smith, Diana Convey, R. B. Gregory, M. L. Kottke, David Collins

Journal:

Surface and Interface Analysis

Year:

2003

Language:

english

File:

PDF, 111 KB

english, 2003

13

Modeling the effect of ion mixing and surface roughening on depth profiles

Harland G. Tompkins

Journal:

Surface and Interface Analysis

Year:

1987

Language:

english

File:

PDF, 506 KB

english, 1987

14

RBS and SIMS characterization of tungsten silicide deposited by using dichlorosilane and tungsten hexafluoride

Richard B. Gregory, Bruce C. Lamartine, T. H. Tom Wu, Harland G. Tompkins

Journal:

Surface and Interface Analysis

Year:

1989

Language:

english

File:

PDF, 478 KB

english, 1989

15

Optical properties of titanium nitride thin films

Harland G. Tompkins, Richard Gregory, Bruce Boeck

Journal:

Surface and Interface Analysis

Year:

1991

Language:

english

File:

PDF, 279 KB

english, 1991

16

Determining the thickness of very thin films of TiW

Harland G. Tompkins

Journal:

Surface and Interface Analysis

Year:

1992

Language:

english

File:

PDF, 458 KB

english, 1992

17

Use of Molecular Vibrations to Analyze Very Thin Films with Infrared Ellipsometry

Tompkins, Harland G., Tiwald, Tom, Bungay, Corey, Hooper, Andrew E.

Journal:

Journal of Physical Chemistry B

Year:

2004

Language:

english

File:

PDF, 91 KB

english, 2004

18

Industrial applications of spectroscopic ellipsometry

Harland G. Tompkins

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 381 KB

english, 2004

19

The Physical Basis for Analysis of the Depth of Absorbing Species Using Internal Reflection Spectroscopy

Tompkins, Harland G.

Journal:

Applied Spectroscopy

Year:

1974

Language:

english

File:

PDF, 584 KB

english, 1974

20

Nitrogen-doped plasma enhanced chemical vapor deposited (PECVD) amorphous carbon: processes and properties

Steven M Smith, Steven A Voight, Harland Tompkins, Andy Hooper, A.Alec Talin, Joseph Vella

Journal:

Thin Solid Films

Year:

2001

Language:

english

File:

PDF, 281 KB

english, 2001

21

Experimental development of reflection-absorption spectroscopy: Infrared spectrum of carbon monoxide adsorbed on copper and copper oxide

Harland G. Tompkins, Robert G. Greenler

Journal:

Surface Science

Year:

1971

Language:

english

File:

PDF, 783 KB

english, 1971

22

An infrared spectroscopic study of carbon monoxide adsorbed on polycrystalline gold using the reflection-absorption technique

Michael L. Kottke, Robert G. Greenler, Harland G. Tompkins

Journal:

Surface Science

Year:

1972

Language:

english

File:

PDF, 735 KB

english, 1972

23

The interaction of No2 with a tin-lead alloy

Harland G. Tompkins

Journal:

Surface Science

Year:

1972

Language:

english

File:

PDF, 498 KB

english, 1972

24

The effect of alloy composition on the interaction of NO2 with tin-lead alloys

Harland G. Tompkins

Journal:

Surface Science

Year:

1973

Language:

english

File:

PDF, 1.42 MB

english, 1973

25

Measuring the Thickness of Oxide on Polysilicon using Ultraviolet Ellipsometry

Tompkins, Harland G.

Journal:

Journal of The Electrochemical Society

Year:

1992

Language:

english

File:

PDF, 838 KB

english, 1992

26

The initial stages of the oxidation of titanium nitride

Tompkins, Harland G.

Journal:

Journal of Applied Physics

Year:

1992

Language:

english

File:

PDF, 657 KB

english, 1992

27

Kinetics and mechanism for desorption of H2O from spin-on-glass

Tompkins, Harland G.

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

1993

Language:

english

File:

PDF, 1011 KB

english, 1993

28

Tightly bound H2O in spin-on-glass

Tompkins, Harland G.

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

1990

Language:

english

File:

PDF, 634 KB

english, 1990

29

Five layer stack of nitride, oxide, and amorphous silicon on glass, analyzed with spectroscopic ellipsometry

Tompkins, Harland G.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1997

Language:

english

File:

PDF, 385 KB

english, 1997

30

Analysis of silicon oxynitrides with spectroscopic ellipsometry and Auger spectroscopy, compared to analyses by Rutherford backscattering spectrometry and Fourier transform infrared spectroscopy

Tompkins, Harland G., Gregory, Richard B., Deal, Paul W., Smith, Steven M.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1999

Language:

english

File:

PDF, 333 KB

english, 1999

31

Oxidation of TiN in an oxygen plasma asher

Tompkins, Harland G.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1994

Language:

english

File:

PDF, 662 KB

english, 1994

32

Modeling the effect of surface roughening on depth profiles. II. Polycrystalline metal

Tompkins, Harland G.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1988

Language:

english

File:

PDF, 550 KB

english, 1988

33

On the surface diffusion of tin on gold in air at room temperature

Tompkins, Harland G.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1984

Language:

english

File:

PDF, 1.26 MB

english, 1984

34

Desorption from oxide films made by plasma enhanced chemical vapor deposition using tetraethylorthosilicate

Tompkins, Harland G.

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

1991

Language:

english

File:

PDF, 609 KB

english, 1991

35

An investigation of the oxidation of Ti:W

Tompkins, Harland G., Lytle, Steve

Journal:

Journal of Applied Physics

Year:

1988

Language:

english

File:

PDF, 725 KB

english, 1988

36

Oxidation of titanium nitride in room air and in dry O2

Tompkins, Harland G.

Journal:

Journal of Applied Physics

Year:

1991

Language:

english

File:

PDF, 751 KB

english, 1991

37

An inorganic anti-reflective coating for use in photolithography

Tompkins, Harland G., Sellers, James A., Tracy, Clarence

Journal:

Journal of Applied Physics

Year:

1993

Language:

english

File:

PDF, 1.12 MB

english, 1993

38

A vacuum cell and associated optics for obtaining a single-reflection infrared spectrum using reflection-absorption spectroscopy

Tompkins, Harland G.

Journal:

Review of Scientific Instruments

Year:

1974

Language:

english

File:

PDF, 412 KB

english, 1974

39

Method for measuring diffusion of moisture in polyimide

Chang, Li-Hsin, Tompkins, Harland

Journal:

Applied Physics Letters

Year:

1991

Language:

english

File:

PDF, 607 KB

english, 1991

40

AES Sensitivity Factors for the Analysis of Silicon Oxynitrides

Tompkins, Harland G.

Journal:

Journal of The Electrochemical Society

Year:

1989

Language:

english

File:

PDF, 500 KB

english, 1989

41

The Interaction of Some Atmospheric Gases with a Tin-Lead Alloy

Tompkins, Harland G.

Journal:

Journal of The Electrochemical Society

Year:

1973

Language:

english

File:

PDF, 536 KB

english, 1973

42

SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Dry Processing for Submicrometer Lithography - Characterization Of Sidewall Passivation Material Deposited During Trench Etch

Vasquez, Barbara, Tompkins, Harland G., Fejes, Peter, Lee, Terrance Y., Smith, Laurel, Bondur, James A., Reinberg, Alan R.

Year:

1990

Language:

english

File:

PDF, 13.20 MB

english, 1990

43

Desorption from Spin-On Glass

Tompkins, Harland G.

Journal:

Journal of The Electrochemical Society

Year:

1989

Language:

english

File:

PDF, 637 KB

english, 1989

44

Unintentional Formation of Etch-Resistant Silicon Nitride

Tompkins, Harland G.

Journal:

Journal of The Electrochemical Society

Year:

1990

Language:

english

File:

PDF, 310 KB

english, 1990

45

Diffusion of Cobalt out of Cobalt-Hardened Gold Measured with Auger Electron Spectroscopy

Tompkins, Harland G.

Journal:

Journal of The Electrochemical Society

Year:

1975

Language:

english

File:

PDF, 499 KB

english, 1975

46

A Special Case of Using Ellipsometry to Measure the Thickness of Oxide on Polysilicon

Tompkins, Harland G.

Journal:

Journal of The Electrochemical Society

Year:

1990

Language:

english

File:

PDF, 448 KB

english, 1990

47

Characterization and Annealing of Sputtered AlN Films for Piezoelectric Resonators

Schade, Mark R., Anderson, Thomas, Deal, Paul W., Evans, Keenan, Fischer, Roland, Saha, Naresh, Cronin, Wayne A., Cave, Nigel, Liaw, Hang M., Lin, Jong K., Tompkins, Harland G.

Journal:

MRS Proceedings

Year:

1994

Language:

english

File:

PDF, 1.00 MB

english, 1994

48

Polycrystalline Grain Structure of Sputtered Aluminum Nitride Films

Matsuda, Asher T, Liaw, H. Ming, Cronin, Wayne A, Tompkins, Harland G, Fejes, Peter L, Evans, Keenan L

Journal:

MRS Proceedings

Year:

1994

Language:

english

File:

PDF, 3.17 MB

english, 1994

49

SPIE Proceedings [SPIE 4th International Conference on Thin Film Physics and Applications - Shanghai, China (Monday 8 May 2000)] Fourth International Conference on Thin Film Physics and Applications - Nitrogen-doped plasma-enhanced CVD amorphous carbon: processes and properties

Voight, Steven A., Chu, Junhao, Liu, Pulin, Smith, Steven M., Tompkins, Harland G., Chang, Yong, Hooper, Andy, Talin, A.

Year:

2000

Language:

english

File:

PDF, 613 KB

english, 2000

50

ChemInform Abstract: DIFFUSION OF COBALT OUT OF COBALT-HARDENED GOLD MEASURED WITH AUGER ELECTRON SPECTROSCOPY

TOMPKINS, HARLAND G.

Journal:

Chemischer Informationsdienst

Year:

1975

File:

PDF, 96 KB

1975

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